Excimer Laser Gas/Arf Premix Gas

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• Iba Pang Mga Kemikal

  • Cream charger
  • AlH3

• Mga Pinaghalong Gas

  • Excimer Laser Gas/Arf Premix Gas

• Etchants

  • GeH4
  • SiH4
  • SiF4
  • BF3
  • HBR
  • N2O
  • WF6
  • SO2
  • SF6

• Mga Reactant

  • HINDI, Nitric Oxide
  • H2S
  • CO, Carbon Monoxide
  • NH3
  • HCL

• Mga hydrocarbons

  • C2H2
  • C3H8
  • CH4
  • C2H6
  • C3H6
  • C2H4
  • EO/ETO

• Maramihan at Rare Gas

  • O2
  • CO2
  • Haydrodyen
  • N2
  • Xenon
  • Neon
  • Kripton
  • Helium
  • Argon
  • CL2

• Mga halocarbon

  • C5F8
  • R508B
  • CHF3
  • C4F8
  • CH3F
  • C2F6
  • C4F6
  • CH2F2
  • CF4
  • C3F8

• Kulayan ng Kulaw

  • R290
  • R170
  • R508B

• Kagamitan sa Gas

  • Magpahitit
  • Rack ng silindro
  • Cabinet ng gas
  • Regulator ng oxygen
  • VMB
  • Tangke ng ISO
  • Silindro Cap
  • Balbula
  • Silindro ng aluminyo
  • Silindrong Bakal