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Using the highest purity raw material gas. Precise preparation with automatic gas premixing system, effectively reducing the influence of human factors. The packaging steel cylinder adopts a unique passivation technology, which can effectively ensure the proportion of trace F2 and ensure reliable stability.
AGEM has maintained close contact with laser cavity equipment manufacturers since the early development of excimer laser devices and has provided assistance in gas research and development.
Currently, we can supply ArF pre-mixed gases for almost all brands of excimer laser devices available in the market.
Excimer gases for partial models
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Brand
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Wavelength
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Cylinder
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Valve
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COHERENT
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193nm
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20 L
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DIN 8
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B & L
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193nm
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20 L/50 L
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DIN 8/ DIN 14
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ZEISS
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193nm
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10L/20 L
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DIN 8
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VISX
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193nm
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16 L
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CGA 679
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NIDEK
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193nm
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16 L
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CGA 679
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LASERSIGHT
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193nm
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10 L
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CGA 679
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Alcon
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193nm
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16 L
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CGA 679
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SCHWIND
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193nm
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20 L
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DIN 8/ DIN 14
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SUMMIT
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193nm
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16 L
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CGA 679
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