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ArF F2 Argon Mixture Laser Gas For Alcon Allegretto Wavelight 400Hz Excimer Laser Gas cylinder
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ArF F2 Argon Mixture Laser Gas For Alcon Allegretto Wavelight 400Hz
Excimer laser gas mixtures are a combination of rare gases (argon,krypton, xenon, or neon) and halogen gases (fluorine or chlorine). The mixture of gases determines the wavelength of DUV light produced. Argon+fluorine+neon (193nm) and Krypton+fluorine+neon (248nm) are the two most common mixtures used. In terms of volume; neon makes up approximately 96–97.5% of the mixture.
Excimer laser gas mixtures are a combination of rare gases (argon,krypton, xenon, or neon) and halogen gases (fluorine or chlorine). The mixture of gases determines the wavelength of DUV light produced. Argon+fluorine+neon (193nm) and Krypton+fluorine+neon (248nm) are the two most common mixtures used. In terms of volume; neon makes up approximately 96–97.5% of the mixture.
Category | Component (%) | Balance Gas |
He-Ne Laser Mixture Gas | 2~8.3 Ne | He |
CO2 Laser Mixture Gas | 0.4H2+ 13.5CO2+ 4.5Kr | / |
0.4 H2+ 13CO2+ 7Kr+ 2CO | ||
0.4 H2+ 8CO2+ 8Kr+ 4CO | ||
0.4 H2+ 6CO2+ 8Kr+ 2CO | ||
0.4 H2+ 16CO2+ 16Kr+ 4CO | ||
0.4 H2+ 8~12CO2+ 8~12Kr | ||
Kr-F2 Laser Mixture Gas | 5 Kr+ 10 F2 | / |
5 Kr+ 1~0.2 F2 | ||
Sealed Beam Laser Gas | 18.5N2+ 3Xe+ 2.5CO | / |
Excimer Laser | 25.8Ne+ 9.8Ar+ 0.004N2+ 1F2 | Ar |
25.8Ne+ 9.8Ar+ 0.004N2+ 5F2 | He | |
25.8Ne+ 9.8Ar+ 0.004N2+ 0.2F2 | He | |
25.8Ne+ 9.8Ar+ 0.004N2+ 5HCl | A |
Excimer gases for partial models | ||||||
Brand | Wavelength | Cylinder | Valve | |||
COHERENT | 193nm | 20 L | DIN 8 | |||
B & L | 193nm | 20 L/50 L | DIN 8/ DIN 14 | |||
ZEISS | 193nm | 10L/20 L | DIN 8 | |||
VISX | 193nm | 16 L | CGA 679 | |||
NIDEK | 193nm | 16 L | CGA 679 | |||
LASERSIGHT | 193nm | 10 L | CGA 679 | |||
Alcon | 193nm | 16 L | CGA 679 | |||
SCHWIND | 193nm | 20 L | DIN 8/ DIN 14 | |||
SUMMIT | 193nm | 16 L | CGA 679 | |||
Other applications of ArF laser include the production of semiconductor integrated circuits. It also facilitates in situ analysis of mineral samples based on the ablation process.
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