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ArF F2 Argon Mixture Laser Gas Mo Alcon Allegretto Wavelight 400Hz Excimer Laser Gas cylinder
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ArF F2 Argon Mixture Laser Gas Mo Alcon Allegretto Wavelight 400Hz
Ko nga ranunga hau laser Excimer he huinga o nga hau onge (argon, krypton, xenon, neon ranei) me nga hau halogen (fluorine, chlorine ranei). Ko te ranunga hau e whakatau ana i te roangaru o te rama DUV ka puta. Argon+fluorine+neon (193nm) me Krypton+fluorine+neon (248nm) nga ranunga e rua e whakamahia ana. Mo te rōrahi; Ko te neon te 96–97.5% o te ranunga.
Ko nga ranunga hau laser Excimer he huinga o nga hau onge (argon, krypton, xenon, neon ranei) me nga hau halogen (fluorine, chlorine ranei). Ko te ranunga hau e whakatau ana i te roangaru o te rama DUV ka puta. Argon+fluorine+neon (193nm) me Krypton+fluorine+neon (248nm) nga ranunga e rua e whakamahia ana. Mo te rōrahi; Ko te neon te 96–97.5% o te ranunga.
kāwai | Wae (%) | Whakatau Hau |
He-Ne Laser Mixture Gas | 2–8.3 Ne | He |
CO2 Taiaho Whakaranu Hau | 0.4H2+ 13.5CO2+ 4.5Kr | / |
0.4 H2+ 13CO2+ 7Kr+ 2CO | ||
0.4 H2+ 8CO2+ 8Kr+ 4CO | ||
0.4 H2+ 6CO2+ 8Kr+ 2CO | ||
0.4 H2+ 16CO2+ 16Kr+ 4CO | ||
0.4 H2+ 8~12CO2+ 8~12Kr | ||
Kr-F2 Taiaho Whakaranu Hau | 5 Kr+ 10 F2 | / |
5 Kr+ 1~0.2 F2 | ||
Hirihia te Kurupae Laser Gas | 18.5N2+ 3Xe+ 2.5CO | / |
Taiaho Excimer | 25.8Ne+ 9.8Ar+ 0.004N2+ 1F2 | Ar |
25.8Ne+ 9.8Ar+ 0.004N2+ 5F2 | He | |
25.8Ne+ 9.8Ar+ 0.004N2+ 0.2F2 | He | |
25.8Ne+ 9.8Ar+ 0.004N2+ 5HCl | A |
Nga hau hihiko mo nga tauira wahanga | ||||||
Brand | roangaru | Poraka | piha | |||
WHAKAARO | 193nm | 20 L | din 8 | |||
B & L | 193nm | 20 L / 50 L | DIN 8/ DIN 14 | |||
NGA ZEISS | 193nm | 10L/20 L | din 8 | |||
VISX | 193nm | 16 L | CGA 679 | |||
NIDEK | 193nm | 16 L | CGA 679 | |||
WHAKAMAHI | 193nm | 10 L | CGA 679 | |||
Alcon | 193nm | 16 L | CGA 679 | |||
SCHWIND | 193nm | 20 L | DIN 8/ DIN 14 | |||
Tuhinga | 193nm | 16 L | CGA 679 | |||
Ko etahi atu tono o te ArF laser ko te hanga i nga waahanga hiko hikohiko. Ka whakahaere ano hoki i te wetewete i roto i nga waahi o nga tauira kohuke i runga i te tukanga tangohanga.
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