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Nga hau parakore teitei mo te hikohiko Monofluoromethane 99.999% FC41 UN 2454 Halocarbon 41 Methyl Fluoride CH3F
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Nga hau parakore teitei mo te hikohiko Monofluoromethane 99.999% FC41 UN 2454 Halocarbon 41 Methyl Fluoride CH3F
AGEM te whakaputa me te hoko i te hau Monofluoromethane (CH3F) tino parakore hei whakamahi i roto i te hangahanga o nga maramara semiconductor.
Fluoromethane, e mohiotia ana ko te methyl fluoride, ko Freon 41, Halocarbon-41 me HFC-41, he hau kore-paitini, karekau i te pāmahana me te pehanga paerewa. He mea hanga mai i te waro, te hauwai, me te fluorine. I ahu mai te ingoa i te mea he mewaro (CH4) me te ngota fluorine hei whakakapi mo tetahi o nga ngota hauwai. Ka whakamahia i roto i nga mahi whakangao semiconductor hei hau etching i roto i nga reactors etch plasma.
Fluoromethane, e kiia ana ko te methyl fluoride (MeF) ko Halocarbon 41 ranei he hau kore-paitini e whakamahia ana i roto i te hanga o nga hua hiko me nga hua hiko. I te aroaro o te mara RF ka wehea ki nga katote fluorine mo te maataki whiriwhiri i nga kiriata pūhui silicon.
Taupānga:CH3F he hau motuhake e whakamahia ana i roto i te mahi hanga maramara semiconductor mo te kiriata nitride micromachining ma te tarai. Ko te CH3F te nuinga e whakamahia ana ki te hanga maramara mahara semiconductor tae atu ki te NAND flash me te DRAM e hiahia ana ki te hangarau micromachining. I te mea he teitei ake te kowhiringa o nga hau i era atu hau, he pai te CH3F mo te miihini miihini o te hanganga paparanga-maha o te uira 3D NAND. Kei te piki haere te tono mo CH3F i enei ra na te tiimata o te maha o nga raina ki te hanga 3D NAND flash.
