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Ua Kīanga Rangirua Mo Ngā Ranga Matihiko Monofluoromethane 99.999% FC41 UN 2454 Halocarbon 41 Methyl Fluoride CH3F
- Tirohanga
- Pātai
- Ngā Mea Tautoko
Ua Kīanga Rangirua Mo Ngā Ranga Matihiko Monofluoromethane 99.999% FC41 UN 2454 Halocarbon 41 Methyl Fluoride CH3F
AGEM whakahaere me hoko i te wāhi tūmataiti Monofluoromethane (CH3F) hei whakamahi i roto i te kaiwhai mahi o ngā pūtahi paihikara.
Fluoromethane, e mōhiotia ana hoki ki te ingoa methyl fluoride, Freon 41, Halocarbon-41 me te HFC-41, he wāhi iti e taea te weha i te wā me te pēra matua. E whaihua ana i te anuhe, te hā, me te fluorine. Ko te ingoa ka tuhinga mai i te mea he mea he methane (CH4) i āheinga atu ai ia i tētahi ātomu fluorine mo tētahi ātomu hā. Whakamahia i roto i ngā kaiwhai mahi paihikara hei wāhi etching i roto i ngā rītā etch plasma.
Fluoromethane, nui ake te kī i a ia ko te methyl fluoride (MeF) rānei ko te Halocarbon 41, he wāhi iti e taea te weha hei whakamahi i te hanga paihikara me ngā mahi elektronika. Ki te noho tahi ia ki tētahi RF maru ka wehea ki ngā ion fluorine mo te etching tohu i runga i ngā mona silicon.
Whakamahinga :CH3F he hāora tūmataiti te āhua i whakamahia i roto i te mahi whakamahi o ngā perehi tahuhu mīkro mō te whakatupu i te kiri nitride ki te etching. Ko te CH3F e whakamahia tonu ana i te hanga i ngā perehi tahuhu e hiahiatia ana e te hanganga mīkro. Nā tērā, nā te mea he rahi ake tana tohu etching i runga i ngā hāora kē, ko te CH3F ka pai hei whakamahi mō te hanga mīkro o te whiu tuara 3D NAND flash. Kei te whai take tonu te tono mo te CH3F i ēnei rā nā te whakapae i te whakatūpato o ētahi wāhanga hei hanga i te 3D NAND flash.
