Air Gas Electronic Materials Enterprise Co., Ltd.

I tēnei kōrero pūrākau, kua kitea e ngā pūtaiao he pūngao matua mō te whakakore. Ko te ingoa o te pūngao c3f8 gas : "C-toru-F-waru. Nō reira he mahi nui rawa tēnei hei whakatika i te mahi whakakore. Kōrerohia ai i tēnei tuhinga te whakamahi a te C3F8 i roto i ngā porowhita hei whakakore, ā, ngā pai hoki o tēnei.

He aha tēnā te Whakakore?

Te Whakamahere: Te whakangungu i te take me ngā rauanga kīmika e pānui ana ki te whakaatu whanui ake o te whakapakoko. He nui ngā take mō tēnei. Ki te tuhia, ka hiahia tātou ki te hanga pūmau pai ā-mata ki roto i tētahi matawhairoki rānei, rānei ka whakamahia hei whakatika i tētahi mea kua hopu kē. Ki te hiahia koe ki te whakapakoko i tētahi mea pai, ka whakamahia te huihuinga o ngā hā kia kitea ai, nō reira ka waihanga rawa atu i te whenua mai i te matawhairoki rānei.

E whai ake nei ngā huihuinga hā i waenganui i ngā hā e rerekē ana, ina he hāwhā, hānitanga rānei, me te fluorine. Kia whai ake tērā ngā hā e āwhina ana ki te whakawehewehe i te mea i hiahia tātou ki te tirotiro. I tēnei huihuinga hā, ka whai ake anō te C3F8 hei whakapai atu i te whakapakoko [5]. Ko tēnei hā matihiko e paunga tonu ana ki te whakawehi me te whakahaere i ngā mahi whakapakoko, ko tērā e nui ana i ngā whenua nui.

Pēhea te Whakangungu o te C3F8?

Te Perfluoropropane (C3F8) he waiū nui rawa i te mātā i te kawe mai i ngā momo whenu o te kīwaha. Ko te whakapā ki te C3F8 ki te poraka waiū nui e mahi ai, ka nui ake te tahuhu o te pūtake. Ko te C3F8 hoki ka nui ake te mahi kawe, i te tino nui ake i te whānui i te tohu.

Ko te whānui he kupu ranei mo te tino taea ki te hoatu i tētahi momo whenu noaiho ko tētahi momo whenu. Nō reira, me utua tēnei whānui, hei tau ki te kawe i te mata o te mete, ā, engari kia noho tonu te rārangi photoresist kei runga. Tēnei whānui nui rawa i te wā o te kawe, ahakoa kāore e hiahia ana ki te hoatu i ngā rārangi hokihoki mea, ko te C3F8 ka nui ake tēnei whānui.

Kei hea te whakamahi i te C3F8?

Nō reira, i ēnei wāhanga katoa kei reira te whakamahi i te kawe, ko te waiū c3f8 . Ko te C3F8 he maha ngā tūtono i roto i te hanga i ngā rīpoata iti noa iho i ngā rīpoata pūoro, ngā WhakairoHikoitiMīhini (MEMS), me ngā paepae kaiherehere rā whakamauru anō hoki e mohiotia ana hei photovoltaics. Ko te tahunga he mahi nui i te whakamahinga i ngā mōhiotanga i ēnei wāhanga, ka taea e koe te whakamahia i te C3F8 ki te whakatangatake i te pai o te tahunga.

Whakamutunga, ka taea e koe hoki te iti i te whiu o te wharekura i runga i te kākano i mahi nei tahi anō hoki i te take whakarite mai i te C3F8. Tēnei ko te nui ake i ngā tūtohitanga e kitea ana kei te whakaaetanga kua kitea he raru te whakawhanaungatanga i te kākano e whakawhanaunga ana ki ngā mea katoa. Ka whakaae te C3F8 i ngā kākano o te tahunga kia noa tonu.

Kei aha te C3F8 mo te Tangata Tahunga?

Ko te C3F8 i tēnei wā he mea nui rawa atu hei whakatau i ngā take matua mō te haurongo whakarite. Nā reira, ka tiakina e te C3F8 i te whiuwhiu me te itinga urutetapu i runga i te kīanga, ā, ka nui ake te tino tika me te whakaoti anō i te mahi. Ko tēnei ka whakamana i a tātou kia whai waihanga i ngā mea hiruhiru (i te maha, Ngā Taonga Pai) ko ngā mea pai hoki i ngā taonga kua maru.

Me pēhea te mahi a te C3F8 i roto i te Whakawehi?

I mua i te kite i ana tikanga whakatupu i roto i te porowhita o ngā hau whakareatanga mō te whakawehi, ko te mōhio ki ngā whakamahi o te C3F8 he mea nui. Ko te C3F8 he hau e taea ana te whakautu i ngā momo whenu i runga i te urupa. Ka hanga ia he kiri tiaki etahi waehere e taea ana te tiaki i te urupa i mua i te kino nei i te mahi i a tātou.

Ko te whakamahi i te C3F8 i roto i ngā porowhita hau whakareatanga hei whakawehi he mea kore raweake, me te hiahia nui ki te rūnui i ngā momo hōtaka. Heoi, me te mōhio pai me te whakamārama i te whakamahi i te C3F8, ka taea e ia hei whakatika i ngā tuhinga me te tino tika mō ngā kaupapa whakawehi.

Nā tēnei ka puta ai c4f8 gas ko C3F8 ka whai i tētahi take nui rawa ki te whakarite i ngā mahi etching me te wāhi mōhio. Ki te kī tonu he wā hāngai, ka awhina te C3F8 i ngā wāhanga rerekē ki te whakapai i te whiu ki ngā mata, ki te iti i te whiu ki runga i ngā mata, ā, ki te whakapai hoki i te wehewehe me te tahuri o te etching. Ko AGEM te matataki i ngā wā hāngai pure me ngā wāhanga hāngai nui rawa, inaianei ko ngā wāhanga hāngai whakaū anō hei whakamahia mo te whiu. Ka taea e ngā kaiarahi e hanga nei i AGEM te kite i te mohiotanga me te takanga ki te hanga i ngā taonga pai rawa i te mutunga.