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For Semiconductor Process Plasma Deposition Gas And Etchant 99.9% C318 Perfluorocyclobutane Refrigerants Gas C4F8
In the production of semiconductor materials and devices, octafluorocyclobutane serves as a deposition gas and etchant. It has also been investigated as a refrigerant in specialised applications, as a replacement for ozone depleting chlorofluorocarbon refrigerants. Exploiting its volatility and chemical inertness, octafluorocyclobutane may be found in some aerosolized foods. It is listed by the Codex Alimentarius under number 946 (E946 for EU). It is investigated as a possible replacement for sulfurhexafluoride as a dielectric gas.