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Understand the application of semiconductor precursors in one article
Dec 21, 2023
1
As the core raw material of the thin film deposition process, semiconductor precursors include epitaxy, chemical vapor deposition (Chemical Vapor Material, Deposition, referred to as CVD) and atomic layer deposition (Atomic Layer Deposition, referred to as ALD) processes to form various thin film materials required for semiconductor manufacturing. , used in various fields of semiconductor manufacturing.
